1. X-ray Photoelectron Spectroscopy, XPS（AXIS ULTRA）

2. X-Ray Diffraction analyzer, XRD（D8-ADVANCE）

3. X-Ray Diffraction, XRD（DX-2700B）

4. Scanning Electron Microscope, SEM (JEM-2010)

5. Transmission Electron Microscope, TEM（JEM-2100）

6. Field Emission Scanning Electron Microscope, FESEM (Nova NanoSEM 450)

7. Scanning Probe Microscope, SPM (Dimension Icon)

8. Raman spectrometer (Renishaw inVia)

9. Fluorescence Spectrophotometer (JY HORIBA FluoroLog-3)

10. Ultraviolet Spectrophotometer (ideliosα)

11. UV-Visible-Near Infrared Spectrophotometer (PE Lambda 950)

12. Scanning Electron Microscope-Nanometer General Pattern Generator, SEM-NGPG (JSM-5600)

13. Semiconductor Characteristic Measurement System  (4200-SCS/F)

14. Cryogenic Probe Station (CCR－VF)

15. Differential Scanning Calorimeter, DSC (EXSTAR 6200)

16. Magnetron Sputtering Evaporation Coating Equipment (JPC-450)

17. Reactive-ion Etching System (Phanpom LT)

18. High Vacuum Film Deposition Apparatus (FDJ650)

19. High vacuum multiple coating apparatus (DZ400)

20. High vacuum four-target magnetron sputtering system

21. Photoelectric conversion performance measurement system (91195A-SYS)

22. Nanoimprint system (NIL2.5)

23. Medium-Frequency Induction Furnace (JDGL-I)

24. Three-Target Magnetron Sputtering System (PVD 75)

25. Scanning Probe Microscope (SPA-400)

26. Minority Carrier Lifetime Tester (MDP spot)

27. Glovebox (LAB2000)

28. Glovebox (ME2000G)

29. Probe Test Stand (KP6500)

30. High Resolution Imaging Spectrometer-Probe Test Stand (iHR320/KP6500)